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Real-time recipe tuning of Reactive Ion Etch (RIE) in Shallow Trench Isolation semiconductor process using R2R control

Enable next generation semiconductor capability on existing process equipment 

Benefits of APC in Semiconductor Manufacturing

What is Process Capability Analysis ?

What are Western Electric Rules?

What are Process Control Charts?

What is Statistical Process Control (SPC)?

Abeer Singhal

Abeer has over a decade of experience in semiconductor processing and advanced manufacturing. He is co-inventor on U.S. patents in the field of semiconductor manufacturing and has extensive experience implementing advanced manufacturing systems for high volume and complexity products. Prior to his role at Sentient, Abeer has worked as an equipment technician, process engineer, advanced process control systems engineer, and manufacturing systems architect. He has a degree in Microelectronic Engineering.